Boosting Electrical Performance of High‑κ Nanomultilayer Dielectrics and Electronic Devices by Combining Solution Combustion Synthesis and UV Irradiation

In the past decade, solution-based dielectric oxides have been widely studied in electronic applications enabling the use of low-cost processing technologies and device improvement. The most promising are the high-κ dielectrics, like aluminum (AlO x ) and hafnium oxide (HfO x ), that allow an easier...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	ACS applied materials & interfaces 2017-11, Vol.9 (46), p.40428-40437
Hauptverfasser:	Carlos, Emanuel, Branquinho, Rita, Kiazadeh, Asal, Martins, Jorge, Barquinha, Pedro, Martins, Rodrigo, Fortunato, Elvira
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!