Measuring optical constants of ultrathin layers using surface-plasmon-resonance-based imaging ellipsometry

A setup for surface-plasmon-resonance- (SPR) based imaging ellipsometry was developed, which gains from the sensitivities of both SPR and ellipsometry to ultrathin film parameters. It is based on Otto's configuration for prism-sample coupling and a wide-beam imaging ellipsometry. A set of ultra...

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Veröffentlicht in:	Applied optics (2004) 2017-10, Vol.56 (28), p.7898-7904
Hauptverfasser:	Shan, Yao, Hu, Guohang, Gu, Liyuan, He, Hongbo, Zeng, Aijun, Zhao, Yuanan, Sytchkova, Anna
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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