Axial geometrical aberration correction up to 5th order with N-SYLC

•Novel corrector for 5th order geometrical aberrations is proposed.•The corrector is a superposition of sextupole, octupole and dodecapole fields.•Each multipole field is generated by N-SYLC.•The corrector is free of magnetic material unlike conventional correctors. We present N-SYLC (N-fold symmetr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Ultramicroscopy 2017-11, Vol.182, p.68-80
Hauptverfasser:	Hoque, Shahedul, Ito, Hiroyuki, Takaoka, Akio, Nishi, Ryuji
Format:	Artikel
Sprache:	eng
Schlagworte:	5th order spherical aberration Aberration correction Hexapole corrector N-fold symmetric line currents Sextupole corrector Sixfold astigmatism
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!