Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings
Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total...
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Veröffentlicht in: | Applied Optics 2017-02, Vol.56 (5), p.1460-1463 |
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description | Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system. |
doi_str_mv | 10.1364/AO.56.001460 |
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B.</creator><creatorcontrib>Oliver, J. B. ; Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics</creatorcontrib><description>Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. 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B.</creatorcontrib><creatorcontrib>Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics</creatorcontrib><title>Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings</title><title>Applied Optics</title><description>Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.</description><subject>Deposition</subject><subject>deposition and fabrication</subject><subject>Evaporation</subject><subject>Film thickness</subject><subject>Impact analysis</subject><subject>materials and process characterization</subject><subject>MATERIALS SCIENCE</subject><subject>Optical coatings</subject><subject>Planetary rotation</subject><subject>Position (location)</subject><subject>Variability</subject><issn>0003-6935</issn><issn>1559-128X</issn><issn>1539-4522</issn><issn>2155-3165</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNotkM1KAzEYRYMoWKs7HyC4cuHUZPI7y1L8KRS60a0hk0nayDQZk1Tw7Z06rj64nHvhOwDcYrTAhNPH5XbB-AIhTDk6AzPMSFNRVtfnYIYQIhVvCLsEVzl_jkwteTMDH-vDoE2B0cEQQ-VDsTub4NDrYItOPzDZ79gfi48hwxhg2VvY-VySb__CU9F-6yEmXWwH41C80T00URcfdvkaXDjdZ3vzf-fg_fnpbfVabbYv69VyUxlCSKkYJqIRrBWmdi2uO2Ja2jTYEilQS6wxAqHauK6TghPhsOicFE5ibBujkZZkDu6m3ZiLV9n4Ys3exBCsKQoTKihFI3Q_QUOKX0ebizr4bGx_-jUes8JSUowxp2xEHybUpJhzsk4NyR9GHwojdXKtllvFuJpck1_NpHIt</recordid><startdate>20170210</startdate><enddate>20170210</enddate><creator>Oliver, J. B.</creator><general>Optical Society of America (OSA)</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><scope>OIOZB</scope><scope>OTOTI</scope></search><sort><creationdate>20170210</creationdate><title>Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings</title><author>Oliver, J. B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c333t-5137975b7c2fb12d3cb4991e3870b3ecc7002cfdd87637f17df87f811e9ca0a83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Deposition</topic><topic>deposition and fabrication</topic><topic>Evaporation</topic><topic>Film thickness</topic><topic>Impact analysis</topic><topic>materials and process characterization</topic><topic>MATERIALS SCIENCE</topic><topic>Optical coatings</topic><topic>Planetary rotation</topic><topic>Position (location)</topic><topic>Variability</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Oliver, J. B.</creatorcontrib><creatorcontrib>Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>OSTI.GOV - Hybrid</collection><collection>OSTI.GOV</collection><jtitle>Applied Optics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Oliver, J. B.</au><aucorp>Univ. of Rochester, Rochester, NY (United States). Lab. for Laser Energetics</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings</atitle><jtitle>Applied Optics</jtitle><date>2017-02-10</date><risdate>2017</risdate><volume>56</volume><issue>5</issue><spage>1460</spage><epage>1463</epage><pages>1460-1463</pages><issn>0003-6935</issn><issn>1559-128X</issn><eissn>1539-4522</eissn><eissn>2155-3165</eissn><abstract>Planetary substrate rotation for optical-coating deposition is evaluated based on initial and final positions for a given layer with different numbers of revolutions and various deposition-source locations. The influence of partial revolutions of the rotation system is analyzed relative to the total number of planetary revolutions in that layer to determine the relative impact on film thickness and uniformity. Guidance is provided on the necessary planetary revolutions that should take place in each layer versus the expected error level in the layer thickness for the modeled system.</abstract><cop>United States</cop><pub>Optical Society of America (OSA)</pub><doi>10.1364/AO.56.001460</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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source | Alma/SFX Local Collection; Optica Publishing Group Journals |
subjects | Deposition deposition and fabrication Evaporation Film thickness Impact analysis materials and process characterization MATERIALS SCIENCE Optical coatings Planetary rotation Position (location) Variability |
title | Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings |
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