Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging

Determination of the mechanical properties of nanostructured soft materials and their composites in a quantitative manner is of great importance to improve the fidelity in their fabrication and to enable the subsequent reliable utility. Here, we report on the characterization of the elastic and phot...

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Veröffentlicht in:	Nanoscale 2017-02, Vol.9 (8), p.2739-2747
Hauptverfasser:	Alonso-Redondo, E, Gueddida, A, Li, J, Graczykowski, B, Sotomayor Torres, C M, Pennec, Y, Yang, S, Djafari-Rouhani, B, Fytas, G
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Elastic waves Infiltration Liquids Lithography Mathematical analysis Nanostructure Propagation
Online-Zugang:	Volltext
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