Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars
Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely amorphous at He+ doses typically used for micromachining, forming nanobubbles at higher doses. In terms of mechanical properti...
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| Veröffentlicht in: | Small (Weinheim an der Bergstrasse, Germany) Germany), 2017-01, Vol.13 (1), p.1601753-n/a |
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| container_title | Small (Weinheim an der Bergstrasse, Germany) |
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| creator | Wang, Yue‐Cun Tian, Lin Liu, Fan Qin, Yuan‐Bin Zheng, Gong Wang, Jing‐Tao Ma, Evan Shan, Zhi‐Wei |
| description | Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely amorphous at He+ doses typically used for micromachining, forming nanobubbles at higher doses. In terms of mechanical properties, the flow stress decreases markedly with increasing dosage, and the softened amorphous Si exhibits spread‐out plastic flow. |
| doi_str_mv | 10.1002/smll.201601753 |
| format | Article |
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In terms of mechanical properties, the flow stress decreases markedly with increasing dosage, and the softened amorphous Si exhibits spread‐out plastic flow.</description><subject>Flow stress</subject><subject>Helium</subject><subject>helium ion microscopes</subject><subject>helium ions dosage</subject><subject>Ion microscopes</subject><subject>mechanical behaviors</subject><subject>Mechanical properties</subject><subject>Micromachining</subject><subject>Nanostructure</subject><subject>Nanotechnology</subject><subject>Silicon</subject><subject>silicon micropillars</subject><subject>Yield strength</subject><issn>1613-6810</issn><issn>1613-6829</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNqNkUtP6zAQRi10Ee8tS2Tpbti0eOw4jpdQ8ZJasSisI9eZUCMn6bUTEP8eV4Ui3Q2sbNlnjmbmI-QU2BgY4xex8X7MGeQMlBQ75AByEKO84PrP9g5snxzG-MKYAJ6pPbLPlWJaKX1Awh16NzT0vmvpzNnQRdutkN6YRXDW9C49T8wQXftMJ0vTPmOkrqX9Eum8D4Pth4DUtBWdoU3fqcTTK1yaV9cF2tV07ryzX-qV896EeEx2a-MjnnyeR-Tp5vpxcjeaPtzeTy6nI5spLkaqTkPVVWVyCQZlXRmwVlRW5rmRqDOsBBSobWFALIxQymacV0qbQmvFwYojcr7xrkL3b8DYl42LFlMPLXZDLKEo0kYUy9UvUCGF1AA8oX__Q1-6IbRpkETJTIHMJEvUeEOtNxoD1uUquMaE9xJYuQ6uXAdXboNLBWef2mHRYLXFv5JKgN4Ab87j-w-6cj6bTr_lH-CdpRQ</recordid><startdate>20170101</startdate><enddate>20170101</enddate><creator>Wang, Yue‐Cun</creator><creator>Tian, Lin</creator><creator>Liu, Fan</creator><creator>Qin, Yuan‐Bin</creator><creator>Zheng, Gong</creator><creator>Wang, Jing‐Tao</creator><creator>Ma, Evan</creator><creator>Shan, Zhi‐Wei</creator><general>Wiley Subscription Services, Inc</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>7X8</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20170101</creationdate><title>Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars</title><author>Wang, Yue‐Cun ; Tian, Lin ; Liu, Fan ; Qin, Yuan‐Bin ; Zheng, Gong ; Wang, Jing‐Tao ; Ma, Evan ; Shan, Zhi‐Wei</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4723-7f160fdda651ae5fda1cc3dc566a5e94ed318e9c8a13ba377c422d79a899721c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>Flow stress</topic><topic>Helium</topic><topic>helium ion microscopes</topic><topic>helium ions dosage</topic><topic>Ion microscopes</topic><topic>mechanical behaviors</topic><topic>Mechanical properties</topic><topic>Micromachining</topic><topic>Nanostructure</topic><topic>Nanotechnology</topic><topic>Silicon</topic><topic>silicon micropillars</topic><topic>Yield strength</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wang, Yue‐Cun</creatorcontrib><creatorcontrib>Tian, Lin</creatorcontrib><creatorcontrib>Liu, Fan</creatorcontrib><creatorcontrib>Qin, Yuan‐Bin</creatorcontrib><creatorcontrib>Zheng, Gong</creatorcontrib><creatorcontrib>Wang, Jing‐Tao</creatorcontrib><creatorcontrib>Ma, Evan</creatorcontrib><creatorcontrib>Shan, Zhi‐Wei</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>MEDLINE - Academic</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>Small (Weinheim an der Bergstrasse, Germany)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wang, Yue‐Cun</au><au>Tian, Lin</au><au>Liu, Fan</au><au>Qin, Yuan‐Bin</au><au>Zheng, Gong</au><au>Wang, Jing‐Tao</au><au>Ma, Evan</au><au>Shan, Zhi‐Wei</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars</atitle><jtitle>Small (Weinheim an der Bergstrasse, Germany)</jtitle><addtitle>Small</addtitle><date>2017-01-01</date><risdate>2017</risdate><volume>13</volume><issue>1</issue><spage>1601753</spage><epage>n/a</epage><pages>1601753-n/a</pages><issn>1613-6810</issn><eissn>1613-6829</eissn><abstract>Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion microscope nanofabrication. 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| source | Wiley Journals |
| subjects | Flow stress Helium helium ion microscopes helium ions dosage Ion microscopes mechanical behaviors Mechanical properties Micromachining Nanostructure Nanotechnology Silicon silicon micropillars Yield strength |
| title | Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars |
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