The effect of local fluence on the micropatterning of poly(ethylene terephthalate) foils through proton beam writing

In this work, we investigate the influence of ion fluence on the development of microstructures produced by 2.2 MeV H + impinging on 12-μm-thick poly(ethylene terephthalate) (PET, Mylar ® ) foils. Several lines of 1 × 100 pixels corresponding to approximately 2.5 × 101.5 µm 2 were patterned on PET f...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2016-07, Vol.122 (7), p.1-6, Article 690
Hauptverfasser:	de Souza, C. T., Stori, E. M., Boufleur, L. A., Papaléo, R. M., Dias, J. F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Condensed Matter Physics Etching Fluence Foils Foils (structural shapes) Machines Manufacturing Micropatterning Microstructure Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Polyethylene terephthalates Processes Surfaces and Interfaces Terephthalate Thin Films
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