Fabrication and characterization of boron-doped nanocrystalline diamond-coated MEMS probes

Fabrication processes of thin boron-doped nanocrystalline diamond (B-NCD) films on silicon-based micro- and nano-electromechanical structures have been investigated. B-NCD films were deposited using microwave plasma assisted chemical vapour deposition method. The variation in B-NCD morphology, struc...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2016-04, Vol.122 (4), p.1-9, Article 270
Hauptverfasser:	Bogdanowicz, Robert, Sobaszek, Michał, Ficek, Mateusz, Kopiec, Daniel, Moczała, Magdalena, Orłowska, Karolina, Sawczak, Mirosław, Gotszalk, Teodor
Format:	Artikel
Sprache:	eng
Schlagworte:	Boron Characterization and Evaluation of Materials Compounding Compounds Condensed Matter Physics Diamond films Diamonds Machines Manufacturing Nanocrystals Nanotechnology Optical and Electronic Materials Parameters Physics Physics and Astronomy Processes Surfaces and Interfaces Thin Films Work functions
Online-Zugang:	Volltext
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