Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes

Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra‐ and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a p...

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Veröffentlicht in:Physica status solidi. A, Applications and materials science Applications and materials science, 2016-11, Vol.213 (11), p.2901-2905
Hauptverfasser: Hibst, Nicolas, Strehle, Steffen
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container_title Physica status solidi. A, Applications and materials science
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creator Hibst, Nicolas
Strehle, Steffen
description Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra‐ and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a preferred electrode material but device fabrication remains a key challenge. In this article, we present a straightforward assembly strategy for directly connected and quasi‐vertically aligned silicon nanowires (SiNWs) that could lead to well‐defined electrode arrays in future. Our strategy exploits certain features of platinum‐catalyzed SiNW growth and simultaneously interlinks the SiNW synthesis and the formation of the electrical contacts using a single metallization film. Our assembly strategy relies fully on conventional photolithography and can cope with various electrode designs and configurations considering single‐nanowire electrode readouts.
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1864576403</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1903149676</sourcerecordid><originalsourceid>FETCH-LOGICAL-c4169-1326eb1c58f36d258ce5dca7bb51490af22924eacd07e22c14afbfb9807c1bf83</originalsourceid><addsrcrecordid>eNqFkU1PGzEQhlcVSOWjV84r9dLLBn-tvT6i0NKqBBCh4mh5vWNqulkHz0Y0_x5HQVHVA5zGGj2PPeO3KE4omVBC2OkS0U4YoZIQrvSH4oA2klWSU723OxPysThEfCRE1ELRg2J-HhK4scT1MP4GDFhGX0KfWyk42_frMgwjPCQ7Qldi6IOLQznYIT5nD0sf0yIMDyU_f5ViB3hc7HvbI3x6rUfFr29f76bfq8vrix_Ts8vKCSp1RTmT0FJXN57LjtWNg7pzVrVtTYUm1jOmmQDrOqKAMUeF9a1vdUOUo61v-FHxZXvvMsWnFeBoFgEd9L0dIK7Q5J1FraQgPKOf_0Mf4yoNeTpDNeH5Pankm1STP6wWUtFMTbaUSxExgTfLFBY2rQ0lZpOE2SRhdklkQW-F59DD-h3a3MznZ_-61dYNOMLfnWvTHyMVV7W5v7ows-nt7I7Kn0bzF-8ynEA</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1845454671</pqid></control><display><type>article</type><title>Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes</title><source>Access via Wiley Online Library</source><creator>Hibst, Nicolas ; Strehle, Steffen</creator><creatorcontrib>Hibst, Nicolas ; Strehle, Steffen</creatorcontrib><description>Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra‐ and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a preferred electrode material but device fabrication remains a key challenge. In this article, we present a straightforward assembly strategy for directly connected and quasi‐vertically aligned silicon nanowires (SiNWs) that could lead to well‐defined electrode arrays in future. Our strategy exploits certain features of platinum‐catalyzed SiNW growth and simultaneously interlinks the SiNW synthesis and the formation of the electrical contacts using a single metallization film. Our assembly strategy relies fully on conventional photolithography and can cope with various electrode designs and configurations considering single‐nanowire electrode readouts.</description><identifier>ISSN: 1862-6300</identifier><identifier>EISSN: 1862-6319</identifier><identifier>DOI: 10.1002/pssa.201600379</identifier><language>eng</language><publisher>Weinheim: Blackwell Publishing Ltd</publisher><subject>Alignment ; Arrays ; Assembly ; catalysts ; Electric contacts ; electrode arrays ; Electrode materials ; Electrodes ; Metallizing ; Nanostructure ; Nanowires ; patterned growth ; Photolithography ; platinum ; Silicon ; Strategy ; Synthesis</subject><ispartof>Physica status solidi. A, Applications and materials science, 2016-11, Vol.213 (11), p.2901-2905</ispartof><rights>2016 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><rights>2016 WILEY-VCH Verlag GmbH &amp; Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c4169-1326eb1c58f36d258ce5dca7bb51490af22924eacd07e22c14afbfb9807c1bf83</citedby><cites>FETCH-LOGICAL-c4169-1326eb1c58f36d258ce5dca7bb51490af22924eacd07e22c14afbfb9807c1bf83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fpssa.201600379$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fpssa.201600379$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,780,784,1417,27924,27925,45574,45575</link.rule.ids></links><search><creatorcontrib>Hibst, Nicolas</creatorcontrib><creatorcontrib>Strehle, Steffen</creatorcontrib><title>Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes</title><title>Physica status solidi. A, Applications and materials science</title><addtitle>Phys. Status Solidi A</addtitle><description>Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra‐ and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a preferred electrode material but device fabrication remains a key challenge. In this article, we present a straightforward assembly strategy for directly connected and quasi‐vertically aligned silicon nanowires (SiNWs) that could lead to well‐defined electrode arrays in future. Our strategy exploits certain features of platinum‐catalyzed SiNW growth and simultaneously interlinks the SiNW synthesis and the formation of the electrical contacts using a single metallization film. Our assembly strategy relies fully on conventional photolithography and can cope with various electrode designs and configurations considering single‐nanowire electrode readouts.</description><subject>Alignment</subject><subject>Arrays</subject><subject>Assembly</subject><subject>catalysts</subject><subject>Electric contacts</subject><subject>electrode arrays</subject><subject>Electrode materials</subject><subject>Electrodes</subject><subject>Metallizing</subject><subject>Nanostructure</subject><subject>Nanowires</subject><subject>patterned growth</subject><subject>Photolithography</subject><subject>platinum</subject><subject>Silicon</subject><subject>Strategy</subject><subject>Synthesis</subject><issn>1862-6300</issn><issn>1862-6319</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNqFkU1PGzEQhlcVSOWjV84r9dLLBn-tvT6i0NKqBBCh4mh5vWNqulkHz0Y0_x5HQVHVA5zGGj2PPeO3KE4omVBC2OkS0U4YoZIQrvSH4oA2klWSU723OxPysThEfCRE1ELRg2J-HhK4scT1MP4GDFhGX0KfWyk42_frMgwjPCQ7Qldi6IOLQznYIT5nD0sf0yIMDyU_f5ViB3hc7HvbI3x6rUfFr29f76bfq8vrix_Ts8vKCSp1RTmT0FJXN57LjtWNg7pzVrVtTYUm1jOmmQDrOqKAMUeF9a1vdUOUo61v-FHxZXvvMsWnFeBoFgEd9L0dIK7Q5J1FraQgPKOf_0Mf4yoNeTpDNeH5Pankm1STP6wWUtFMTbaUSxExgTfLFBY2rQ0lZpOE2SRhdklkQW-F59DD-h3a3MznZ_-61dYNOMLfnWvTHyMVV7W5v7ows-nt7I7Kn0bzF-8ynEA</recordid><startdate>201611</startdate><enddate>201611</enddate><creator>Hibst, Nicolas</creator><creator>Strehle, Steffen</creator><general>Blackwell Publishing Ltd</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>201611</creationdate><title>Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes</title><author>Hibst, Nicolas ; Strehle, Steffen</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4169-1326eb1c58f36d258ce5dca7bb51490af22924eacd07e22c14afbfb9807c1bf83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Alignment</topic><topic>Arrays</topic><topic>Assembly</topic><topic>catalysts</topic><topic>Electric contacts</topic><topic>electrode arrays</topic><topic>Electrode materials</topic><topic>Electrodes</topic><topic>Metallizing</topic><topic>Nanostructure</topic><topic>Nanowires</topic><topic>patterned growth</topic><topic>Photolithography</topic><topic>platinum</topic><topic>Silicon</topic><topic>Strategy</topic><topic>Synthesis</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hibst, Nicolas</creatorcontrib><creatorcontrib>Strehle, Steffen</creatorcontrib><collection>Istex</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Physica status solidi. A, Applications and materials science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hibst, Nicolas</au><au>Strehle, Steffen</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes</atitle><jtitle>Physica status solidi. A, Applications and materials science</jtitle><addtitle>Phys. Status Solidi A</addtitle><date>2016-11</date><risdate>2016</risdate><volume>213</volume><issue>11</issue><spage>2901</spage><epage>2905</epage><pages>2901-2905</pages><issn>1862-6300</issn><eissn>1862-6319</eissn><abstract>Arrays composed of vertically aligned nanoscale electrodes are under discussion for various biological and analytical applications including extra‐ and intracellular measurements, intracellular drug delivery, and cellular interfacing. Based on their nanoscale morphology, conductive nanowires are a preferred electrode material but device fabrication remains a key challenge. In this article, we present a straightforward assembly strategy for directly connected and quasi‐vertically aligned silicon nanowires (SiNWs) that could lead to well‐defined electrode arrays in future. Our strategy exploits certain features of platinum‐catalyzed SiNW growth and simultaneously interlinks the SiNW synthesis and the formation of the electrical contacts using a single metallization film. Our assembly strategy relies fully on conventional photolithography and can cope with various electrode designs and configurations considering single‐nanowire electrode readouts.</abstract><cop>Weinheim</cop><pub>Blackwell Publishing Ltd</pub><doi>10.1002/pssa.201600379</doi><tpages>5</tpages></addata></record>
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subjects Alignment
Arrays
Assembly
catalysts
Electric contacts
electrode arrays
Electrode materials
Electrodes
Metallizing
Nanostructure
Nanowires
patterned growth
Photolithography
platinum
Silicon
Strategy
Synthesis
title Direct synthesis of electrically integrated silicon nanowires forming 3D electrodes
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-23T03%3A08%3A14IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Direct%20synthesis%20of%20electrically%20integrated%20silicon%20nanowires%20forming%203D%20electrodes&rft.jtitle=Physica%20status%20solidi.%20A,%20Applications%20and%20materials%20science&rft.au=Hibst,%20Nicolas&rft.date=2016-11&rft.volume=213&rft.issue=11&rft.spage=2901&rft.epage=2905&rft.pages=2901-2905&rft.issn=1862-6300&rft.eissn=1862-6319&rft_id=info:doi/10.1002/pssa.201600379&rft_dat=%3Cproquest_cross%3E1903149676%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1845454671&rft_id=info:pmid/&rfr_iscdi=true