Nanometer-Resolved Fluidity of an Oleophilic Monomer between Silica Surfaces Modified with Fluorinated Monolayers for Nanoimprinting

Ultraviolet (UV) nanoimprinting has the potential to fabricate sub-15 nm resin patterns, but the interfacial fluidity of organic monomers near monomer liquid/mold solid interfaces related to filling nanoscale mold recesses with UV-curable resins still remains unclear. In this study, we demonstrated...

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Veröffentlicht in:	ACS applied materials & interfaces 2017-02, Vol.9 (7), p.6591-6598
Hauptverfasser:	Ito, Shunya, Kasuya, Motohiro, Kurihara, Kazue, Nakagawa, Masaru
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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