Quantitative determination of element distributions in silicon based thin film solar cells using SNMS

The determination of elemental distributions in thin film solar cells based on amorphous silicon using electron beam SNMS is possible by quantifying the measured ion intensities. The relative sensitivity factors (RSFs) for all elements measured have to be known. The RSFs have been determined experim...

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Veröffentlicht in:	Analytical and bioanalytical chemistry 1995-10, Vol.353 (3-4), p.478-482
Hauptverfasser:	GASTEL, M, BREUER, U, HOLZBRECHER, H, BECKER, J. S, DIETZE, H.-J, KUBON, M, WAGNER, H
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Exact sciences and technology Spectrometric and optical methods
Online-Zugang:	Volltext
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