Comparison of batch and in-line PECVD of a-Si:H passivation layers for silicon heterojunction solar cells

We present PECVD deposition of i‐a‐Si:H in an in‐line configuration for the fabrication of silicon heterojunction solar cells. For industry, in‐line processing has the potential to increase production throughput and yield. We compared batch and in‐line fabrication of i‐a‐Si:H passivation samples wit...

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Veröffentlicht in:	Physica status solidi. PSS-RRL. Rapid research letters 2016-10, Vol.10 (10), p.725-729
Hauptverfasser:	Landheer, Kees, Kaiser, Monja, Poulios, Ioannis, Dörenkämper, Maarten, Soppe, Wim J., Schropp, Ruud E. I., Rath, Jatin K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Deposition heterojunction solar cells Heterojunctions in-line deposition Passivation Photovoltaic cells Plasma Silicon Solar cells Substrates transient depletion
Online-Zugang:	Volltext
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