Microlens fabrication by 3D electron beam lithography combined with thermal reflow technique

Microlenses are widely used in mobile phones, digital projectors, light emitting diodes, etc. In this work, the microlenses were fabricated on fused silica substrates using dose modulated 3D electron beam lithography combined with thermal reflow technique. The focused spot size of microlenses after...

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Veröffentlicht in:	Microelectronic engineering 2016-10, Vol.164, p.23-29
Hauptverfasser:	Grigaliūnas, Viktoras, Lazauskas, Algirdas, Jucius, Dalius, Viržonis, Darius, Abakevičienė, Brigita, Smetona, Saulius, Tamulevičius, Sigitas
Format:	Artikel
Sprache:	eng
Schlagworte:	3D patterning Atomic force microscopes E-beam lithography Electron beam lithography Exposure Light-emitting diodes Microlens Microlenses Optical microscopy Reproduction Spots Thermal reflow
Online-Zugang:	Volltext
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