Optimization of Ta sub(2) O sub(5) optical thin film deposited by radio frequency magnetron sputtering

Radio frequency magnetron sputtering has been used here to find the parameters at which to deposit Ta sub(2) O sub(5) optical thin films with negligible absorption in the visible spectrum. The design of experiment methodology was employed to minimize the number of experiments needed to find the opti...

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Veröffentlicht in:	Applied optics (2004) 2016-07, Vol.55 (20), p.5353-5357
Hauptverfasser:	Shakoury, R, Willey, Ronald R
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption Design of experiments Magnetron sputtering Optimization Radio frequencies Refractivity Thin films Visible spectrum
Online-Zugang:	Volltext
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