Lumped element modeling of air-coupled capacitive micromachined ultrasonic transducers with annular cell geometry

•We presented a lumped element model of air-coupled annular-cell CMUTs.•Explicit resonance frequency and static displacement of a clamped annular plate were developed.•The proposed lumped model was verified through both simulation and experimental studies.•Detailed analysis of the static, frequency,...

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Veröffentlicht in:	Ultrasonics 2017-04, Vol.76, p.19-27
Hauptverfasser:	Na, Shuai, Wong, Lawrence L.P., Chen, Albert I.H., Li, Zhenhao, Macecek, Mirek, Yeow, John T.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Air-coupled ultrasound Annular cells Capacitive micromachined ultrasonic transducers (CMUTs) Lumped element model
Online-Zugang:	Volltext
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