Development of betavoltaic cell technology production based on microchannel silicon and its electrical parameters evaluation

In the paper a manufacturing process of three-dimensional (3D) microchannel structure by silicon (Si) anodic etching was discussed. The possibility of microchannels formation allows to increase the active area more than 100 times. In this structure the p-n junction on the whole Si surface was formed. The obtained data allowed to evaluate the characteristics of the betavoltaic converter with a 3D structure by using isotope 63Ni with a specific activity of 10Ci/g. •The microchannels formation possibility increases the active area more than 100 times.•p-n junction on Si surface was formed.