Effect of Flexible Substrates on the Structural and Optical Properties of ZnO Films Deposited by Sputtering Method

Zinc Oxide (ZnO) has attracted much attention because of its high optical transmittance approximately ~80 % with a wide band gap of (3.3 eV at 300 K) and a relatively low cost material. ZnO thin films were deposited on plastic substrate using RF powered magnetron sputtering method. The target used i...

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Veröffentlicht in:	Advanced Materials Research 2015-06, Vol.1107, p.678-683
Hauptverfasser:	Salleh, Saafie, Mui Li, Lam, Alias, Afishah, Mani, Azmizam Manie
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Diffraction Magnetron sputtering Sputtering Substrates Thin films X-rays Zinc oxide
Online-Zugang:	Volltext
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