Application of Extended Smoluchowski Equations to Formation of Silver Nanoclusters Generated by Direct Current Magnetron Sputtering Source

We apply the extended Smoluchowski rate equations with neutralization process between nanocluster (NC) anion and cation to study the formation of silver NCs generated by direct current magnetron sputtering (DC-MSP). By comparing the experimental and simulation results, it was found that the origin o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of the Physical Society of Japan 2016-09, Vol.85 (9), p.1-1
Hauptverfasser:	Zhang, Chuhang, Feng, Yuanxin
Format:	Artikel
Sprache:	eng
Schlagworte:	Agglomeration Comparative analysis Direct current Formations Ions Magnetron sputtering Mathematical analysis Nanostructure Silver Simulation Tuning
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!