Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer

This paper presents a detailed analysis on the influence of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer, which can fabricate two-dimensional grating structures in a single exposure. In an ideal condition, defect-free two-dimensional grating...

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Veröffentlicht in:	Optics express 2016-11, Vol.24 (24), p.27521-27535
Hauptverfasser:	Shimizu, Yuki, Aihara, Ryo, Ren, Zongwei, Chen, Yuan-Liu, Ito, So, Gao, Wei
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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