Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining

In this Letter, a novel fabrication of large-area concave microlens array (MLA) on silicon is demonstrated by combination of high-speed laser scanning, which would result in single femtosecond laser pulse ablation on surface of silicon, and subsequent wet etching. Microscale concave microlenses with...

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Veröffentlicht in:	Optics letters 2015-05, Vol.40 (9), p.1928-1931
Hauptverfasser:	Deng, Zefang, Yang, Qing, Chen, Feng, Meng, Xiangwei, Bian, Hao, Yong, Jiale, Shan, Chao, Hou, Xun
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Apertures Femtosecond Laser arrays Laser machining Lasers Scanning Silicon
Online-Zugang:	Volltext
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