Anchor Loss Variation in MEMS Wine-Glass Mode Disk Resonators Due to Fluctuating Fabrication Process

With increasing demand for high-frequency, high-quality factor (Q-factor) mechanical resonators, the Q-factor declining issue at high-frequency becomes increasingly prominent. This paper studies the performance variations of disk resonators under the wine-glass vibration mode due to the support beam...

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Veröffentlicht in:	IEEE sensors journal 2016-09, Vol.16 (18), p.6846-6856
Hauptverfasser:	Dong, Linxi, Tao, Jiaping, Bao, Jinyan, Zhao, Wen-Sheng, Wang, Gaofeng
Format:	Artikel
Sprache:	eng
Schlagworte:	Beams (supports) Deviation Disks Energy loss finite element analysis Mathematical models Micro-electromechanical systems (MEMS) micro-mechanical disk resonator Offsets Optical resonators Propagation losses Q-factor quality factor Resonant frequencies Resonant frequency Resonators Sensors support loss Vibration mode Vibrations wine-glass mode
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