Slope-deviation measurement of Fresnel-shaped mold surfaces
Molds are used to dictate their shape to other materials in embossing or filling processes. In optics fabrication especially, the exact surface slope of the polymer replica is of high relevance. The quality control of molds is challenging: non-invasive, optical metrologies struggle with shiny surfac...
Gespeichert in:
| Veröffentlicht in: | Applied Optics 2016-03, Vol.55 (8), p.2091-2097 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 2097 |
|---|---|
| container_issue | 8 |
| container_start_page | 2091 |
| container_title | Applied Optics |
| container_volume | 55 |
| creator | Kiefel, Peter Hornung, Thorsten Nitz, Peter Reinecke, Holger |
| description | Molds are used to dictate their shape to other materials in embossing or filling processes. In optics fabrication especially, the exact surface slope of the polymer replica is of high relevance. The quality control of molds is challenging: non-invasive, optical metrologies struggle with shiny surfaces that minimize the scattering of light. In addition, the inspection of complex shaped molds with a stepped optical surface can be difficult. In response, the authors show a backward ray-tracing approach combined with fringe-reflection technique to determine the slopes of a Fresnel-shaped mold surface with topography features in the magnitude order of a quarter millimeter. The error is kept small by stitching together several measurements with different sample rotations. |
| doi_str_mv | 10.1364/AO.55.002091 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1835613346</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1773807458</sourcerecordid><originalsourceid>FETCH-LOGICAL-c367t-ff59166f34e99001bd7667c1c00abb47752c7a301e919c75ad01cc5bfab4ab5e3</originalsourceid><addsrcrecordid>eNqFkM9LAzEQhYMotlZvnmWPHtw62WSSBk-lWBUKPajnkM1OcGV_uekK_veutHr1NDzm48H7GLvkMOdCydvldo44B8jA8CM2zThiKrjCYzYFAJEqI3DCzmJ8HxNKo0_ZJFNGywXoKbt7rtqO0oI-S7cr2yapycWhp5qaXdKGZN1TbKhK45vrqEjqtiqS8R-cp3jOToKrIl0c7oy9ru9fVo_pZvvwtFpuUi-U3qUhoOFKBSHJGACeF1op7bkHcHkutcbMayeAk-HGa3QFcO8xDy6XLkcSM3a97-369mOguLN1GT1VlWuoHaLlC4GKCyHV_6jWYtwtcTGiN3vU922MPQXb9WXt-i_Lwf6YtcutRbR7syN-dWge8pqKP_hXpfgGNi1ydw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1773807458</pqid></control><display><type>article</type><title>Slope-deviation measurement of Fresnel-shaped mold surfaces</title><source>OSA Publishing</source><source>Alma/SFX Local Collection</source><creator>Kiefel, Peter ; Hornung, Thorsten ; Nitz, Peter ; Reinecke, Holger</creator><creatorcontrib>Kiefel, Peter ; Hornung, Thorsten ; Nitz, Peter ; Reinecke, Holger</creatorcontrib><description>Molds are used to dictate their shape to other materials in embossing or filling processes. In optics fabrication especially, the exact surface slope of the polymer replica is of high relevance. The quality control of molds is challenging: non-invasive, optical metrologies struggle with shiny surfaces that minimize the scattering of light. In addition, the inspection of complex shaped molds with a stepped optical surface can be difficult. In response, the authors show a backward ray-tracing approach combined with fringe-reflection technique to determine the slopes of a Fresnel-shaped mold surface with topography features in the magnitude order of a quarter millimeter. The error is kept small by stitching together several measurements with different sample rotations.</description><identifier>ISSN: 0003-6935</identifier><identifier>ISSN: 1559-128X</identifier><identifier>EISSN: 2155-3165</identifier><identifier>EISSN: 1539-4522</identifier><identifier>DOI: 10.1364/AO.55.002091</identifier><identifier>PMID: 26974807</identifier><language>eng</language><publisher>United States</publisher><subject>Error analysis ; Inspection ; Metrology ; Molds ; Slopes ; Stepped ; Stitching ; Topography</subject><ispartof>Applied Optics, 2016-03, Vol.55 (8), p.2091-2097</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c367t-ff59166f34e99001bd7667c1c00abb47752c7a301e919c75ad01cc5bfab4ab5e3</citedby><cites>FETCH-LOGICAL-c367t-ff59166f34e99001bd7667c1c00abb47752c7a301e919c75ad01cc5bfab4ab5e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/26974807$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Kiefel, Peter</creatorcontrib><creatorcontrib>Hornung, Thorsten</creatorcontrib><creatorcontrib>Nitz, Peter</creatorcontrib><creatorcontrib>Reinecke, Holger</creatorcontrib><title>Slope-deviation measurement of Fresnel-shaped mold surfaces</title><title>Applied Optics</title><addtitle>Appl Opt</addtitle><description>Molds are used to dictate their shape to other materials in embossing or filling processes. In optics fabrication especially, the exact surface slope of the polymer replica is of high relevance. The quality control of molds is challenging: non-invasive, optical metrologies struggle with shiny surfaces that minimize the scattering of light. In addition, the inspection of complex shaped molds with a stepped optical surface can be difficult. In response, the authors show a backward ray-tracing approach combined with fringe-reflection technique to determine the slopes of a Fresnel-shaped mold surface with topography features in the magnitude order of a quarter millimeter. The error is kept small by stitching together several measurements with different sample rotations.</description><subject>Error analysis</subject><subject>Inspection</subject><subject>Metrology</subject><subject>Molds</subject><subject>Slopes</subject><subject>Stepped</subject><subject>Stitching</subject><subject>Topography</subject><issn>0003-6935</issn><issn>1559-128X</issn><issn>2155-3165</issn><issn>1539-4522</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNqFkM9LAzEQhYMotlZvnmWPHtw62WSSBk-lWBUKPajnkM1OcGV_uekK_veutHr1NDzm48H7GLvkMOdCydvldo44B8jA8CM2zThiKrjCYzYFAJEqI3DCzmJ8HxNKo0_ZJFNGywXoKbt7rtqO0oI-S7cr2yapycWhp5qaXdKGZN1TbKhK45vrqEjqtiqS8R-cp3jOToKrIl0c7oy9ru9fVo_pZvvwtFpuUi-U3qUhoOFKBSHJGACeF1op7bkHcHkutcbMayeAk-HGa3QFcO8xDy6XLkcSM3a97-369mOguLN1GT1VlWuoHaLlC4GKCyHV_6jWYtwtcTGiN3vU922MPQXb9WXt-i_Lwf6YtcutRbR7syN-dWge8pqKP_hXpfgGNi1ydw</recordid><startdate>20160310</startdate><enddate>20160310</enddate><creator>Kiefel, Peter</creator><creator>Hornung, Thorsten</creator><creator>Nitz, Peter</creator><creator>Reinecke, Holger</creator><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20160310</creationdate><title>Slope-deviation measurement of Fresnel-shaped mold surfaces</title><author>Kiefel, Peter ; Hornung, Thorsten ; Nitz, Peter ; Reinecke, Holger</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c367t-ff59166f34e99001bd7667c1c00abb47752c7a301e919c75ad01cc5bfab4ab5e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Error analysis</topic><topic>Inspection</topic><topic>Metrology</topic><topic>Molds</topic><topic>Slopes</topic><topic>Stepped</topic><topic>Stitching</topic><topic>Topography</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kiefel, Peter</creatorcontrib><creatorcontrib>Hornung, Thorsten</creatorcontrib><creatorcontrib>Nitz, Peter</creatorcontrib><creatorcontrib>Reinecke, Holger</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied Optics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Kiefel, Peter</au><au>Hornung, Thorsten</au><au>Nitz, Peter</au><au>Reinecke, Holger</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Slope-deviation measurement of Fresnel-shaped mold surfaces</atitle><jtitle>Applied Optics</jtitle><addtitle>Appl Opt</addtitle><date>2016-03-10</date><risdate>2016</risdate><volume>55</volume><issue>8</issue><spage>2091</spage><epage>2097</epage><pages>2091-2097</pages><issn>0003-6935</issn><issn>1559-128X</issn><eissn>2155-3165</eissn><eissn>1539-4522</eissn><abstract>Molds are used to dictate their shape to other materials in embossing or filling processes. In optics fabrication especially, the exact surface slope of the polymer replica is of high relevance. The quality control of molds is challenging: non-invasive, optical metrologies struggle with shiny surfaces that minimize the scattering of light. In addition, the inspection of complex shaped molds with a stepped optical surface can be difficult. In response, the authors show a backward ray-tracing approach combined with fringe-reflection technique to determine the slopes of a Fresnel-shaped mold surface with topography features in the magnitude order of a quarter millimeter. The error is kept small by stitching together several measurements with different sample rotations.</abstract><cop>United States</cop><pmid>26974807</pmid><doi>10.1364/AO.55.002091</doi><tpages>7</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6935 |
| ispartof | Applied Optics, 2016-03, Vol.55 (8), p.2091-2097 |
| issn | 0003-6935 1559-128X 2155-3165 1539-4522 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1835613346 |
| source | OSA Publishing; Alma/SFX Local Collection |
| subjects | Error analysis Inspection Metrology Molds Slopes Stepped Stitching Topography |
| title | Slope-deviation measurement of Fresnel-shaped mold surfaces |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-24T19%3A59%3A54IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Slope-deviation%20measurement%20of%20Fresnel-shaped%20mold%20surfaces&rft.jtitle=Applied%20Optics&rft.au=Kiefel,%20Peter&rft.date=2016-03-10&rft.volume=55&rft.issue=8&rft.spage=2091&rft.epage=2097&rft.pages=2091-2097&rft.issn=0003-6935&rft.eissn=2155-3165&rft_id=info:doi/10.1364/AO.55.002091&rft_dat=%3Cproquest_cross%3E1773807458%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1773807458&rft_id=info:pmid/26974807&rfr_iscdi=true |