Investigation on the laser ablation of SiC ceramics using microa[euro]Raman mapping technique

Research on the laser ablation behavior of SiC ceramics has great significance for the improvement of their anti-laser ability as high-performance mirrors in space and lasers, or the laser surface micro-machining technology as electronic components in micro-electron mechanical systems (MEMS). In thi...

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Veröffentlicht in:	Journal of advanced ceramics 2016-09, Vol.5 (3), p.253-261
Hauptverfasser:	Fu, Chaoli, Yang, Yong, Huang, Zhengren, Liu, Guiling, Zhang, Hui, Jiang, Fang, Wei, Yuquan, Jiao, Zheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Ceramics Craters Laser ablation Lasers Mapping Silicon carbide Silicon dioxide
Online-Zugang:	Volltext
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