Local functionalization of CMOS-compatible Si3N4 Mach-Zehnder interferometers with printable functional polymers

•An integrated optical waveguide based four-channel Mach-Zehnder interferometric (MZI) sensor device was fabricated.•To study the self-referencing properties we compared two sensor configurations—an asymmetric MZI configuration, where the reference waveguide was covered by a cladding, and a symmetri...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2016-11, Vol.236, p.1061-1068
Hauptverfasser:	Melnik, Eva, Muellner, Paul, Mutinati, Giorgio C., Koppitsch, Guenther, Schrank, Franz, Hainberger, Rainer, Laemmerhofer, Michael
Format:	Artikel
Sprache:	eng
Schlagworte:	Asymmetry Detection DNA detection Inkjet printing Liquids Mach-Zehnder interferometer MRSA Photonic sensor Sensors Silicon nitride Streptavidin-biotin-system Symmetry Waveguides
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