Effect of Boron Doping on the Wear Behavior of the Growth and Nucleation Surfaces of Micro- and Nanocrystalline Diamond Films

B-doped diamond has become the ultimate material for applications in the field of microelectromechanical systems (MEMS), which require both highly wear resistant and electrically conductive diamond films and microstructures. Despite the extensive research of the tribological properties of undoped di...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	ACS applied materials & interfaces 2016-10, Vol.8 (39), p.26381-26391
Hauptverfasser:	Buijnsters, Josephus G, Tsigkourakos, Menelaos, Hantschel, Thomas, Gomes, Francis O. V, Nuytten, Thomas, Favia, Paola, Bender, Hugo, Arstila, Kai, Celis, Jean-Pierre, Vandervorst, Wilfried
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!