Synthesis of silicon oxide nanowires by the GJ EBP CVD method using different diluent gases

Nanowires of silicon oxide SiOx (x ≤ 2) were synthesized from a mixture of monosilane and hydrogen (helium, argon) by gas‐jet electron beam plasma chemical vapor deposition (GJ EBP CVD) method with simultaneous supply of oxygen into the vacuum chamber. The synthesis was performed on monocrystalline...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2016-07, Vol.213 (7), p.1774-1782
Hauptverfasser:	Khmel, S. Ya, Baranov, E. A., Zaikovskii, A. V., Zamchiy, A. O., Maximovskiy, E. A., Gulyaev, D. V., Zhuravlev, K. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Bundles Catalysts Chemical vapor deposition electron-beam plasma Gases Hydrogen Nanostructure Nanowires photoluminescence silicon oxide Silicon oxides Spectrum analysis Synthesis
Online-Zugang:	Volltext
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