Effect of Si/Fe Composition, Substrate Temperature, and Substrate Orientation on the Structure and Magnetic Properties of Fe-Si Alloy Film

  Fe100–xSix (x = 0, 2, 6, 10 at. %) alloy films are prepared on MgO single-crystal substrates of (001), (110), and (111) orientations at temperatures ranging between room temperature and 600 °C by using a radio-frequency magnetron sputtering system. The film growth behavior, the crystallographic pr...

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Veröffentlicht in:	Journal of the Magnetics Society of Japan 2016/07/01, Vol.40(4), pp.95-106
Hauptverfasser:	Aida, Takuya, Kawai, Tetsuroh, Ohtake, Mitsuru, Futamoto, Masaaki, Kirino, Fumiyoshi, Inaba, Nobuyuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystallography epitaxial thin film Fe100–xSix (x = 0 – 10 at. %) alloy Magnetic anisotropy Magnetic properties Magnetron sputtering MgO single-crystal substrate Orientation Silicon substrates Single crystals soft magnetic property Substrates
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