Effect of ultraviolet light irradiation and ion collision on the quality of multilayer graphene prepared by microwave surface-wave plasma chemical vapor deposition

We successfully synthesized graphene by microwave surface-wave plasma chemical vapor deposition (CVD) and investigated the effect of UV light and ion collision from the plasma exposure during graphene synthesis. The graphene obtained here was multilayer graphene consisting of approximately 5 layers...

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Veröffentlicht in:	Diamond and related materials 2016-06, Vol.66, p.157-162
Hauptverfasser:	Ichimura, Susumu, Hayashi, Yasuhiko, Umeno, Masayoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic collisions Chemical vapor deposition Defect characterization Graphene Graphite Irradiation Light irradiation Microwaves Multilayers Nanostructures Plasma CVD Surface characterization Synthesis (chemistry)
Online-Zugang:	Volltext
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