Application of RF magnetron sputtering for growth of AZO on glass substrate

Aluminum zinc oxide (AZO), as one of the most promising transparent conducting oxide (TCO) materials, has now been widely used in thin film solar cells. In this study the optimization process of the RF magnetron sputtered AZO films was performed at room temperature by studying its physical propertie...

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Veröffentlicht in:	Journal of crystal growth 2016-08, Vol.447, p.62-66
Hauptverfasser:	Ghorannevisa, Z, Akbarnejadb, E, Elahib, ASalar, Ghorannevissb, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Azo Photovoltaic cells Physical properties Scanning electron microscopy Solar cells Thin films X-ray diffraction
Online-Zugang:	Volltext
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