Electrostatic Micro-Hydraulic Systems

MEMS micro-hydraulic structures for amplification of force or deflection are introduced. These structures are integrated with capacitances to form electrostatic micro-hydraulic actuators (EMA). Hydraulic amplification and liquid permittivity are used to create stand-alone, efficient, and large defle...

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2016-06, Vol.25 (3), p.557-569
Hauptverfasser:	Sadeghi, Mahdi M., Kim, Hanseup S., Peterson, Rebecca L. Becky, Najafi, Khalil
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Amplification Arrays Capacitors Deflection Devices electrostatic devices Electrostatics Fluid dynamics Fluid flow Force Hydraulic systems Hydraulics Liquids microfabrication Permittivity Sensors
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