Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line

This paper describes a MEMS-CMOS integrated tactile sensor for surface mounting on a flexible and stretchable bus line. The sensor is featured by the following configurations; (1) A sensing diaphragm is formed on a CMOS substrate by backside etching, and (2) the CMOS substrate is flip-bonded to a sp...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2016-04, Vol.240, p.167-176
Hauptverfasser: Asano, Sho, Muroyama, Masanori, Bartley, Travis, Kojima, Takahiro, Nakayama, Takahiro, Yamaguchi, Ui, Yamada, Hitoshi, Nonomura, Yutaka, Hata, Yoshiyuki, Funabashi, Hirofumi, Tanaka, Shuji
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Sprache:eng
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