Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line
This paper describes a MEMS-CMOS integrated tactile sensor for surface mounting on a flexible and stretchable bus line. The sensor is featured by the following configurations; (1) A sensing diaphragm is formed on a CMOS substrate by backside etching, and (2) the CMOS substrate is flip-bonded to a sp...
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Veröffentlicht in: | Sensors and actuators. A. Physical. 2016-04, Vol.240, p.167-176 |
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Hauptverfasser: | , , , , , , , , , , |
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Sprache: | eng |
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