Characterization of dual-target co-sputtered novel Hf-doped ZnSnO semiconductors and the enhanced stability of its associated thin film transistors

The novel hafnium added ZnSnO (ZTO) thin films were deposited by a dual-target magnetron co-sputtering system. The effect of hafnium doping content on the structure, surface morphology, chemical compositions, optical and electrical properties of HZTO thin films is studied. The HZTO thin films with h...

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Veröffentlicht in:	Journal of alloys and compounds 2016-10, Vol.681, p.81-87
Hauptverfasser:	Huang, Chuan-Xin, Li, Jun, Fu, Yi-Zhou, Zhang, Jian-Hua, Jiang, Xue-Yin, Zhang, Zhi-Lin, Yang, Qiu-Hong
Format:	Artikel
Sprache:	eng
Schlagworte:	Doping Dual-target magnetron co-sputtering Gates Hafnium HfZnSnO thin film Semiconductor devices Semiconductors Stability Thin film transistors Thin films
Online-Zugang:	Volltext
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