The impact of wafering on organic and inorganic surface contaminations
[Display omitted] •A rapid and sensitive method for the measurement of organic impurities on wafer surfaces was developed.•A sub-optimal wafering process may introduce more than 4-fold of organic impurities.•The usefulness of trace element analysis on wafer surfaces is demonstrated.•A significant re...
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Veröffentlicht in: | Applied surface science 2016-08, Vol.378, p.384-387 |
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creator | Meyer, S. Wahl, S. Timmel, S. Köpge, R. Jang, B.-Y. |
description | [Display omitted]
•A rapid and sensitive method for the measurement of organic impurities on wafer surfaces was developed.•A sub-optimal wafering process may introduce more than 4-fold of organic impurities.•The usefulness of trace element analysis on wafer surfaces is demonstrated.•A significant reduction of metal contaminations was found on wafers after alkaline pre-cleaning.•The implementation of organic and inorganic surface analysis into the manufacturing process is recommended.
Beside the silicon feedstock material, the crystallization process and the cell processing itself, the wafer sawing process can strongly determine the final solar cell quality. Especially surface contamination is introduced in this process step because impurities from sawing meet with a virgin silicon surface which is highly reactive until the oxide layer is formed. In this paper we quantitatively analysed both, the organic and inorganic contamination on wafer surfaces and show that changes of process parameters during wafering may cause dramatic changes in surface purity. We present powerful techniques for the monitoring of wafer surface quality which is essential for the production of high efficiency and high quality solar cells. |
doi_str_mv | 10.1016/j.apsusc.2016.03.227 |
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•A rapid and sensitive method for the measurement of organic impurities on wafer surfaces was developed.•A sub-optimal wafering process may introduce more than 4-fold of organic impurities.•The usefulness of trace element analysis on wafer surfaces is demonstrated.•A significant reduction of metal contaminations was found on wafers after alkaline pre-cleaning.•The implementation of organic and inorganic surface analysis into the manufacturing process is recommended.
Beside the silicon feedstock material, the crystallization process and the cell processing itself, the wafer sawing process can strongly determine the final solar cell quality. Especially surface contamination is introduced in this process step because impurities from sawing meet with a virgin silicon surface which is highly reactive until the oxide layer is formed. In this paper we quantitatively analysed both, the organic and inorganic contamination on wafer surfaces and show that changes of process parameters during wafering may cause dramatic changes in surface purity. We present powerful techniques for the monitoring of wafer surface quality which is essential for the production of high efficiency and high quality solar cells.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2016.03.227</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Contamination ; Monitoring ; Organic and inorganic impurities ; Oxides ; Photovoltaic cells ; Quantitative determination ; Sawing ; Silicon ; Solar cells ; Wafer surface ; Wafers</subject><ispartof>Applied surface science, 2016-08, Vol.378, p.384-387</ispartof><rights>2016 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c339t-ad4558eba791e11fe4162e8b594f0ac579673ded66a00f617100d59cde14571b3</citedby><cites>FETCH-LOGICAL-c339t-ad4558eba791e11fe4162e8b594f0ac579673ded66a00f617100d59cde14571b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2016.03.227$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids></links><search><creatorcontrib>Meyer, S.</creatorcontrib><creatorcontrib>Wahl, S.</creatorcontrib><creatorcontrib>Timmel, S.</creatorcontrib><creatorcontrib>Köpge, R.</creatorcontrib><creatorcontrib>Jang, B.-Y.</creatorcontrib><title>The impact of wafering on organic and inorganic surface contaminations</title><title>Applied surface science</title><description>[Display omitted]
•A rapid and sensitive method for the measurement of organic impurities on wafer surfaces was developed.•A sub-optimal wafering process may introduce more than 4-fold of organic impurities.•The usefulness of trace element analysis on wafer surfaces is demonstrated.•A significant reduction of metal contaminations was found on wafers after alkaline pre-cleaning.•The implementation of organic and inorganic surface analysis into the manufacturing process is recommended.
Beside the silicon feedstock material, the crystallization process and the cell processing itself, the wafer sawing process can strongly determine the final solar cell quality. Especially surface contamination is introduced in this process step because impurities from sawing meet with a virgin silicon surface which is highly reactive until the oxide layer is formed. In this paper we quantitatively analysed both, the organic and inorganic contamination on wafer surfaces and show that changes of process parameters during wafering may cause dramatic changes in surface purity. We present powerful techniques for the monitoring of wafer surface quality which is essential for the production of high efficiency and high quality solar cells.</description><subject>Contamination</subject><subject>Monitoring</subject><subject>Organic and inorganic impurities</subject><subject>Oxides</subject><subject>Photovoltaic cells</subject><subject>Quantitative determination</subject><subject>Sawing</subject><subject>Silicon</subject><subject>Solar cells</subject><subject>Wafer surface</subject><subject>Wafers</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNp9kEtPwzAQhC0EEqXwDzj4yCXBjh9JLkio4iVV4lLOlmtviqvGDnYC4t_jKnDltBrNzmj3Q-iakpISKm_3pR7SlExZZVUSVlZVfYIWtKlZIUTDT9EiG23BGavO0UVKe0Jold0Fety8A3b9oM2IQ4e_dAfR-R0OHoe4094ZrL3Fzv-pNMVOG8Am-FH3zuvRBZ8u0VmnDwmufucSvT0-bFbPxfr16WV1vy4MY-1YaMvzPbDVdUuB0g44lRU0W9Hyjmgj6lbWzIKVUhPSSVpTQqxojQXKRU23bIlu5t4hho8J0qh6lwwcDtpDmJKiTSW4bASVeZXPqyaGlCJ0aoiu1_FbUaKO2NRezdjUEZsiTGVsOXY3xyC_8ekgqmQceAPWRTCjssH9X_ADUg14Jg</recordid><startdate>20160815</startdate><enddate>20160815</enddate><creator>Meyer, S.</creator><creator>Wahl, S.</creator><creator>Timmel, S.</creator><creator>Köpge, R.</creator><creator>Jang, B.-Y.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20160815</creationdate><title>The impact of wafering on organic and inorganic surface contaminations</title><author>Meyer, S. ; Wahl, S. ; Timmel, S. ; Köpge, R. ; Jang, B.-Y.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c339t-ad4558eba791e11fe4162e8b594f0ac579673ded66a00f617100d59cde14571b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Contamination</topic><topic>Monitoring</topic><topic>Organic and inorganic impurities</topic><topic>Oxides</topic><topic>Photovoltaic cells</topic><topic>Quantitative determination</topic><topic>Sawing</topic><topic>Silicon</topic><topic>Solar cells</topic><topic>Wafer surface</topic><topic>Wafers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Meyer, S.</creatorcontrib><creatorcontrib>Wahl, S.</creatorcontrib><creatorcontrib>Timmel, S.</creatorcontrib><creatorcontrib>Köpge, R.</creatorcontrib><creatorcontrib>Jang, B.-Y.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Meyer, S.</au><au>Wahl, S.</au><au>Timmel, S.</au><au>Köpge, R.</au><au>Jang, B.-Y.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The impact of wafering on organic and inorganic surface contaminations</atitle><jtitle>Applied surface science</jtitle><date>2016-08-15</date><risdate>2016</risdate><volume>378</volume><spage>384</spage><epage>387</epage><pages>384-387</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>[Display omitted]
•A rapid and sensitive method for the measurement of organic impurities on wafer surfaces was developed.•A sub-optimal wafering process may introduce more than 4-fold of organic impurities.•The usefulness of trace element analysis on wafer surfaces is demonstrated.•A significant reduction of metal contaminations was found on wafers after alkaline pre-cleaning.•The implementation of organic and inorganic surface analysis into the manufacturing process is recommended.
Beside the silicon feedstock material, the crystallization process and the cell processing itself, the wafer sawing process can strongly determine the final solar cell quality. Especially surface contamination is introduced in this process step because impurities from sawing meet with a virgin silicon surface which is highly reactive until the oxide layer is formed. In this paper we quantitatively analysed both, the organic and inorganic contamination on wafer surfaces and show that changes of process parameters during wafering may cause dramatic changes in surface purity. We present powerful techniques for the monitoring of wafer surface quality which is essential for the production of high efficiency and high quality solar cells.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2016.03.227</doi><tpages>4</tpages></addata></record> |
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subjects | Contamination Monitoring Organic and inorganic impurities Oxides Photovoltaic cells Quantitative determination Sawing Silicon Solar cells Wafer surface Wafers |
title | The impact of wafering on organic and inorganic surface contaminations |
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