Synthesis of Diamond Nanoplatelets/Carbon Nanowalls on Graphite Substrate by MPCVD

The films composed of carbon nanowalls and diamond nanoplatelets,respectively,can be simultaneously formed on graphite substrate by controlling the hydrogen etching rate during microwave plasma chemical vapor deposition.To modulate the etching rate,two kinds of substrate design were used:a bare grap...

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Veröffentlicht in:Plasma science & technology 2015-07, Vol.17 (7), p.579-582
Hauptverfasser: Zhang, Wei, Lyu, Jilei, Lin, Xiaoqi, Zhu, Jinfeng, Man, Weidong, Jiang, Nan
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Sprache:eng
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Zusammenfassung:The films composed of carbon nanowalls and diamond nanoplatelets,respectively,can be simultaneously formed on graphite substrate by controlling the hydrogen etching rate during microwave plasma chemical vapor deposition.To modulate the etching rate,two kinds of substrate design were used:a bare graphite plate and a graphite groove covered with a single crystal diamond sheet.After deposition at 1200℃ for 3 hours,we find that dense diamond nanoplatelets were grown on the bare graphite,whereas carbon nanowalls were formed on the grooved surface,indicating that not only reaction temperature but also etching behavior is a key factor for nanostructure formation.
ISSN:1009-0630
DOI:10.1088/1009-0630/17/7/09