Improved spectrum simulation for validating SEM-EDS analysis

X-ray microanalysis by SEM-EDS requires corrections for the many physical processes that affect emitted intensity for elements present in the material. These corrections will only be accurate provided a number of conditions are satisfied and it is essential that the correct elements are identified....

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2016-02, Vol.109 (1), p.12016-12025
Hauptverfasser:	Statham, P, Penman, C, Duncumb, P
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Atomic properties Bremsstrahlung Computer simulation Data acquisition Detectors Errors Materials science Mathematical models Simulation
Online-Zugang:	Volltext
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