Characterisation of the barrier formation process of self-forming barriers with CuMn, CuTi and CuZr alloys

In this work three elements were investigated as Cu alloys for the self-forming barrier approach: Mn, Ti and Zr. Firstly pure alloy films were prepared in the concentration range from 3 to 9at.%. The thin films were analysed with four point probe, X-ray photoelectron spectroscopy (XPS), X-ray diffra...

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