Effects of intermittent atomization on the properties of Al-doped ZnO thin films deposited by aerosol-assisted chemical vapor deposition

Al-doped ZnO (AZO) thin films were prepared on glass substrates with different atomization interval times by aerosol-assisted chemical vapor deposition method. The structure, morphology, and optical and electrical properties were investigated by X-ray diffractometer, atomic force microscope, UV-vis...

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Veröffentlicht in:	Thin solid films 2016-04, Vol.605, p.163-168
Hauptverfasser:	Liu, Linjie, Wang, Lixin, Qin, Xiujuan, Cui, Li, Shao, Guangjie
Format:	Artikel
Sprache:	eng
Schlagworte:	Aerosol-assisted chemical vapor deposition Aerosols Aluminum-doped zinc oxide Atomization Atomization interval time Atomizing Azo Chemical vapor deposition Intervals Thin films Zinc oxide
Online-Zugang:	Volltext
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