Determination of sample surface topography using electron back-scatter diffraction patterns
The background of an electron backscattered diffraction pattern contains quantitative surface topography data. We propose a new approach to extract this topography from the location of the maximum background intensity in each diffraction pattern. Using specular reflection as a zero-th order approxim...
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| Veröffentlicht in: | Scripta materialia 2016-07, Vol.120, p.23-26 |
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| container_title | Scripta materialia |
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| creator | Chapman, M. Callahan, P.G. De Graef, M. |
| description | The background of an electron backscattered diffraction pattern contains quantitative surface topography data. We propose a new approach to extract this topography from the location of the maximum background intensity in each diffraction pattern. Using specular reflection as a zero-th order approximation, we employ Monte Carlo simulations to determine corrections to the scattering angles, which then allow us to accurately determine the local surface normal. We derive the theoretical model and illustrate the approach experimentally using a β-Sn sphere, for which we determine the local surface normal orientation from the background intensity shifts in electron backscatter diffraction patterns.
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| doi_str_mv | 10.1016/j.scriptamat.2016.03.032 |
| format | Article |
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[Display omitted]</description><subject>Approximation</subject><subject>Computer simulation</subject><subject>Diffraction patterns</subject><subject>Electron back scatter diffraction</subject><subject>Electron backscattering diffraction (EBSD)</subject><subject>Mathematical analysis</subject><subject>Modeling</subject><subject>Monte Carlo methods</subject><subject>Monte Carlo simulation</subject><subject>Specular reflection</subject><subject>Surface structure</subject><subject>Topography</subject><issn>1359-6462</issn><issn>1872-8456</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNqFUE1PxCAUJEYT19X_wNFLK1Cg7VHXz8TEi548EKCwsralAjXZfy-7a-LRZJL3MpmZvDcAQIxKjDC_2pRRBzclOchUksyUqMogR2CBm5oUDWX8OO8VawtOOTkFZzFuEEIcE7wA77cmmTC4USbnR-gtjHKYegPjHKzUBiY_-XWQ08cWztGNa2h6o1PIWiX1ZxG1TDkAds7aIPU-ZNpTYzwHJ1b20Vz8ziV4u797XT0Wzy8PT6vr50JThFOR78BKcdZ2TKmKcMwI0rTlpOa4U9bqtlaKIYY5rRtcGdrRRmHaIq5V3TVttQSXh9wp-K_ZxCQGF7XpezkaP0eBG8wR46yqs7Q5SHXwMQZjxRTcIMNWYCR2fYqN-OtT7PoUqMog2XpzsJr8yrczIQudGbXpXMiNiM67_0N-ANA8hSs</recordid><startdate>20160715</startdate><enddate>20160715</enddate><creator>Chapman, M.</creator><creator>Callahan, P.G.</creator><creator>De Graef, M.</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20160715</creationdate><title>Determination of sample surface topography using electron back-scatter diffraction patterns</title><author>Chapman, M. ; Callahan, P.G. ; De Graef, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c401t-1211bb659d5bb3261520c4962761dbffc97bb5051647813e4d48b14906cb7d893</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Approximation</topic><topic>Computer simulation</topic><topic>Diffraction patterns</topic><topic>Electron back scatter diffraction</topic><topic>Electron backscattering diffraction (EBSD)</topic><topic>Mathematical analysis</topic><topic>Modeling</topic><topic>Monte Carlo methods</topic><topic>Monte Carlo simulation</topic><topic>Specular reflection</topic><topic>Surface structure</topic><topic>Topography</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Chapman, M.</creatorcontrib><creatorcontrib>Callahan, P.G.</creatorcontrib><creatorcontrib>De Graef, M.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Scripta materialia</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Chapman, M.</au><au>Callahan, P.G.</au><au>De Graef, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Determination of sample surface topography using electron back-scatter diffraction patterns</atitle><jtitle>Scripta materialia</jtitle><date>2016-07-15</date><risdate>2016</risdate><volume>120</volume><spage>23</spage><epage>26</epage><pages>23-26</pages><issn>1359-6462</issn><eissn>1872-8456</eissn><abstract>The background of an electron backscattered diffraction pattern contains quantitative surface topography data. We propose a new approach to extract this topography from the location of the maximum background intensity in each diffraction pattern. Using specular reflection as a zero-th order approximation, we employ Monte Carlo simulations to determine corrections to the scattering angles, which then allow us to accurately determine the local surface normal. We derive the theoretical model and illustrate the approach experimentally using a β-Sn sphere, for which we determine the local surface normal orientation from the background intensity shifts in electron backscatter diffraction patterns.
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| ispartof | Scripta materialia, 2016-07, Vol.120, p.23-26 |
| issn | 1359-6462 1872-8456 |
| language | eng |
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| source | Access via ScienceDirect (Elsevier) |
| subjects | Approximation Computer simulation Diffraction patterns Electron back scatter diffraction Electron backscattering diffraction (EBSD) Mathematical analysis Modeling Monte Carlo methods Monte Carlo simulation Specular reflection Surface structure Topography |
| title | Determination of sample surface topography using electron back-scatter diffraction patterns |
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