Characterizations of etch pits formed on single crystal diamond surface using oxygen/hydrogen plasma surface treatment

Etch pits formed on (001)-oriented single crystal diamond surfaces by O/H plasma etching have been investigated using optical microscopy. Shapes of the formed pits are basically inverted-pyramidal hollows with the edge directions of the 〈110〉, but central areas of these pits have two types of shapes...

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Veröffentlicht in:	Diamond and related materials 2016-03, Vol.63, p.43-46
Hauptverfasser:	Tsubouchi, Nobuteru, Mokuno, Y., Shikata, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Camber Diamond Diamonds Dislocation Dislocations Etch pit Etching Flat-bottom shape Oxygen/hydrogen plasma Pits Point-bottom shape Polishing damage Single crystals Substrates Tilt
Online-Zugang:	Volltext
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