Study of Cu-doped SnO thin films prepared by reactive co-sputtering with facing targets of Sn and Cu

The properties of Cu-doped SnO thin films with various Cu contents (Sn1−xCuxO) prepared by reactive co-sputtering using facing targets of Sn and Cu are investigated. The XRD patterns show the tetragonal SnO phases including the mixed phase of Cu2O (200) and metallic Cu (111). The XRD phase ratio of...

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