Low temperature-pyrosol-deposition of aluminum-doped zinc oxide thin films for transparent conducting contacts

Aluminum doped-zinc oxide (ZnO:Al) thin films with thickness ~1000nm have been deposited by the ultrasonic spray pyrolysis technique using low substrate temperatures in the range from 285 to 360°C. The electrical and optical properties of the ZnO:Al (AZO) films were investigated by Uv–vis spectrosco...

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Veröffentlicht in:	Thin solid films 2016-04, Vol.605, p.108-115
Hauptverfasser:	Rivera, M.J., Ramírez, E.B., Juárez, B., González, J., García-León, J.M., Escobar-Alarcón, L., Alonso, J.C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aggregates Atomic force microscopy Azo Deposition Electrical and optical properties Electrical resistivity Low-temperature pyrolysis TCO Thin films Ultrasonic spray X-ray diffraction Zinc oxide ZnO:Al
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