Better 3D inspection with structured illumination: signal formation and precision

Better 3D inspection with structured illumination: signal formation and precision

3D metrology faces increasing demands for higher precision and larger space-bandwidth-speed product (number of 3D points/s). In this paper we consider structured-illumination microscopy as a means for satisfying these demands, developing a theoretical model of the signal formation for both optically...

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Veröffentlicht in:Applied Optics 2015-08, Vol.54 (22), p.6652-6660
Hauptverfasser: Yang, Zheng, Kessel, Alexander, Häusler, Gerd
Format: Artikel
Sprache:eng
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Demand
Formations
Illumination
Inspection
Metrology
Microscopy
Optimization
Three dimensional
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container_end_page 6660
container_issue 22
container_start_page 6652
container_title Applied Optics
container_volume 54
creator Yang, Zheng
Kessel, Alexander
Häusler, Gerd
description 3D metrology faces increasing demands for higher precision and larger space-bandwidth-speed product (number of 3D points/s). In this paper we consider structured-illumination microscopy as a means for satisfying these demands, developing a theoretical model of the signal formation for both optically smooth and optically rough surfaces. The model allows us to investigate physical limits on precision and to establish rules that allow sensor parameter optimization for greatest precision or highest speed.
doi_str_mv 10.1364/AO.54.006652
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source Alma/SFX Local Collection; Optica Publishing Group Journals
subjects Demand
Formations
Illumination
Inspection
Metrology
Microscopy
Optimization
Three dimensional
title Better 3D inspection with structured illumination: signal formation and precision
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