Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation

High-precision stages are widely used in the semiconductor and flat panel industries. Because six degrees of freedom have to be controlled in these stages, coupling forces can degrade their control performance and stability. This paper proposes a decoupling control method from the scanning motion x...

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Veröffentlicht in:	IEEJ JOURNAL OF INDUSTRY APPLICATIONS 2016-01, Vol.5 (2), p.141-147
Hauptverfasser:	Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, Kazuaki
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Center of gravity Decoupling Flat panels Misalignment Scanning Semiconductors
Online-Zugang:	Volltext
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