Precise autofocus method employing normalized fluorescence image size in a two-photon polymerization nanofabrication system

The autofocus method has been investigated to improve the precise positioning of a substrate surface at the center of the laser focal spot in two-photon polymerization (TPP) nanofabrication. For this purpose, we developed a novel autofocus method using normalized image size, which was calculated wit...

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Veröffentlicht in:	Applied Optics 2015-08, Vol.54 (24), p.7323-7329
Hauptverfasser:	Jeon, Byoung Goo, Jung, Byung Je, Kong, Hong Jin, Cho, Yong Hoon
Format:	Artikel
Sprache:	eng
Schlagworte:	Fluorescence Lasers Mathematical analysis Nanostructure Polymerization Robustness Spots
Online-Zugang:	Volltext
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