Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system
This paper describes the design and measurement of a dual Phase-Locked Loop system that utilizes a MEMS VCO with a DC-controlled silicon resonator as the frequency-setting element. System-level considerations are given for the use of such structure in temperature compensation system for MEMS referen...
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| Veröffentlicht in: | Analog integrated circuits and signal processing 2016-03, Vol.86 (3), p.385-391 |
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| container_title | Analog integrated circuits and signal processing |
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| creator | Gronicz, Jakub Aaltonen, Lasse Chekurov, Nikolai Halonen, Kari |
| description | This paper describes the design and measurement of a dual Phase-Locked Loop system that utilizes a MEMS VCO with a DC-controlled silicon resonator as the frequency-setting element. System-level considerations are given for the use of such structure in temperature compensation system for MEMS reference oscillators. Micromachining process and circuit design challenges of the particular implementation are also discussed. The PLL has been implemented using a 0.35 μm CMOS process and operates with a nominal supply of 3 V. The nominal supply voltage for the MEMS VCO is 24 V with 15 V bias applied to the silicon resonator. |
| doi_str_mv | 10.1007/s10470-015-0685-x |
| format | Article |
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The nominal supply voltage for the MEMS VCO is 24 V with 15 V bias applied to the silicon resonator.</description><subject>Circuit design</subject><subject>Circuits and Systems</subject><subject>CMOS</subject><subject>Electrical Engineering</subject><subject>Engineering</subject><subject>Micromachining</subject><subject>Oscillators</subject><subject>Resonators</subject><subject>Signal,Image and Speech Processing</subject><subject>Silicon</subject><subject>Temperature compensation</subject><subject>Voltage</subject><issn>0925-1030</issn><issn>1573-1979</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNp9kE9PwzAMxSMEEmPwAbj1yCXgJEu7HNE0_kidAAHnKHUT1qltRtJK7NuTqZw52Zbfs55_hFwzuGUAxV1ksCiAApMU8qWkPydkxmQhKFOFOiUzUFxSBgLOyUWMOwDgxQJm5G3dWhyCp53FrekbNG22PVShqbPXssycD9lmvXnPfMSmbc2Q5sF2exvMMAaboU99H83Q-D6Lh5h2l-TMmTbaq786J58P64_VEy1fHp9X9yVFodhABZcCVY6OYZULMM5Uhaqxcoq5XFVMytoWxnFeKY5oDSrgrq5VLXOshOBiTm6mu_vgv0cbB901EW0K2Vs_Rs2WsIRcSXWUskmKwccYrNP70HQmHDQDfcSnJ3w64dNHfPonefjkiUnbf9mgd34MffroH9MvS2J09Q</recordid><startdate>20160301</startdate><enddate>20160301</enddate><creator>Gronicz, Jakub</creator><creator>Aaltonen, Lasse</creator><creator>Chekurov, Nikolai</creator><creator>Halonen, Kari</creator><general>Springer US</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SC</scope><scope>7SP</scope><scope>8FD</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope><orcidid>https://orcid.org/0000-0002-6448-2729</orcidid></search><sort><creationdate>20160301</creationdate><title>Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system</title><author>Gronicz, Jakub ; Aaltonen, Lasse ; Chekurov, Nikolai ; Halonen, Kari</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c391t-3253c96cf1cb630afab79dcbf91f69b155de7af22b92cceac902fdd9d56cb3323</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Circuit design</topic><topic>Circuits and Systems</topic><topic>CMOS</topic><topic>Electrical Engineering</topic><topic>Engineering</topic><topic>Micromachining</topic><topic>Oscillators</topic><topic>Resonators</topic><topic>Signal,Image and Speech Processing</topic><topic>Silicon</topic><topic>Temperature compensation</topic><topic>Voltage</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Gronicz, Jakub</creatorcontrib><creatorcontrib>Aaltonen, Lasse</creatorcontrib><creatorcontrib>Chekurov, Nikolai</creatorcontrib><creatorcontrib>Halonen, Kari</creatorcontrib><collection>CrossRef</collection><collection>Computer and Information Systems Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><jtitle>Analog integrated circuits and signal processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Gronicz, Jakub</au><au>Aaltonen, Lasse</au><au>Chekurov, Nikolai</au><au>Halonen, Kari</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system</atitle><jtitle>Analog integrated circuits and signal processing</jtitle><stitle>Analog Integr Circ Sig Process</stitle><date>2016-03-01</date><risdate>2016</risdate><volume>86</volume><issue>3</issue><spage>385</spage><epage>391</epage><pages>385-391</pages><issn>0925-1030</issn><eissn>1573-1979</eissn><abstract>This paper describes the design and measurement of a dual Phase-Locked Loop system that utilizes a MEMS VCO with a DC-controlled silicon resonator as the frequency-setting element. 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| language | eng |
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| source | Springer Nature - Complete Springer Journals |
| subjects | Circuit design Circuits and Systems CMOS Electrical Engineering Engineering Micromachining Oscillators Resonators Signal,Image and Speech Processing Silicon Temperature compensation Voltage |
| title | Electro-mechanical hybrid PLL for MEMS oscillator temperature compensation system |
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