Nanostep Fabrication Using FIB Technology

The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the measurement and characterization of nanosteps are important to improve the accuracy of nano-fabrication. This paper studies on the relationship between the morph...

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Veröffentlicht in:	Advanced Materials Research 2013-01, Vol.655-657, p.842-846
Hauptverfasser:	Wang, Chen Ying, Yang, Shuming, Jiang, Zhuang De, Lin, Qi Jing
Format:	Artikel
Sprache:	eng
Schlagworte:	Constants Ion beams Nanostructure Process parameters Slopes Technology utilization
Online-Zugang:	Volltext
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