Improving holographic reconstruction by automatic Butterworth filtering for microelectromechanical systems characterization

Digital holographic microscopy is an important interferometric tool in optical metrology allowing the investigation of engineered surfaces with microscale lateral resolution and nanoscale axial precision. In particular, microelectromechanical systems (MEMS) surface analysis, conducted by holographic...

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Veröffentlicht in:	Applied Optics 2015-04, Vol.54 (11), p.3428-3432
Hauptverfasser:	Matrecano, Marcella, Memmolo, Pasquale, Miccio, Lisa, Persano, Anna, Quaranta, Fabio, Siciliano, Pietro, Ferraro, Pietro
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Automation Filtering Filtration Mathematical models Microelectromechanical systems Nanostructure Roughness
Online-Zugang:	Volltext
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