Unconventional Use of a Photoresist as a Nitrogen Gas Generator Forming Transparent Dome-Shaped Microcavities

The phenomenon that a common positive photoresist (PR) releases nitrogen (N2) gas when exposed to UV light has never been used or received any particular attention. Fabrication process to intentionally trap the generated N2 gas during UV exposure, thereby, to form the microcavity structure is propos...

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Veröffentlicht in:	Advanced engineering materials 2016-04, Vol.18 (4), p.559-566
Hauptverfasser:	Han, Chang-Hoon, Seo, Min-Ho, Ko, Seung-Deok, Yoon, Young-Hoon, Yoon, Gun-Wook, Yoon, Jun-Bo
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Exposure Gas generators Holes Microcavities Packages Photoresists Replication
Online-Zugang:	Volltext
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