Nanoscale Mechanical and Tribological Properties of Plasma Nanotextured COP Surfaces with Hydrophobic Coatings

Cyclo olefin polymer (COP) surfaces, treated in oxygen plasmas under highly anisotropic conditions to favor roughness formation, are coated with thin hydrophobic films to form surfaces of enhanced hydrophobicity. As hydrophobic coatings, plasma‐deposited fluorocarbon or spin‐coated Teflon thin films are implemented. Nanoindentation and nanoscratch experiments have been employed to elucidate the effect of plasma treatment on the mechanical and tribological performance of the synthesized materials. It is shown that short‐time plasma treatment slightly changes mechanical and tribological properties of plasma‐nanotextured COP, as compared to untreated. The plasma deposited hydrophobic film on the COP surfaces presents good adhesion and it effectively protects the surfaces, reducing plastic deformation. O2 plasma deep reactive ion etching with simultaneous nanotexturing of Cyclo olefin polymer (COP) in a high‐density plasma reactor is performed. COP surfaces are coated with thin hydrophobic films to form surfaces of enhanced hydrophobicity and superhydrophobicity. To determine the effect of the plasma treatment on surface mechanical behavior and the adhesion of coatings onto nanotextured substrates, nanoindentation and nanoscratch are performed.