Monolithic integration of a silica-based 16-channel VMUX/VDMUX on quartz substrate
A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz...
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| Veröffentlicht in: | Journal of semiconductors 2014-10, Vol.35 (10), p.70-73 |
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| container_end_page | 73 |
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| container_issue | 10 |
| container_start_page | 70 |
| container_title | Journal of semiconductors |
| container_volume | 35 |
| creator | 代红庆 安俊明 王玥 张家顺 王亮亮 王红杰 李建光 吴远大 钟飞 查强 |
| description | A monolithic integrated variable attenuator multiplexer/demultiplexer is demonstrated. It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. The power consumption is only 110 mW at the attenuation of 20 dB per channel. |
| doi_str_mv | 10.1088/1674-4926/35/10/104010 |
| format | Article |
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It is composed of a 16-channel 200 GHz silica-based arrayed waveguide grating and an array of Mach-Zehnder interferometer thermo-optic variable optical attenuators. The integrated device is fabricated on a quartz substrate, which eliminates the process of depositing the undercladding layer and reduces the power consumption compared with a device fabricated on a silicon substrate. The insertion loss and crosstalk of the integrated device are -5 dB and less than -22 dB, respectively. 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| ispartof | Journal of semiconductors, 2014-10, Vol.35 (10), p.70-73 |
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| source | IOP Publishing Journals; Alma/SFX Local Collection |
| subjects | 16通道 Attenuators Devices Multiplexing Noise levels Power consumption Quartz Semiconductors Silicon substrates 二氧化硅基 单片集成 可变光衰减器 多路复用器 石英衬底 阵列波导光栅 集成器件 |
| title | Monolithic integration of a silica-based 16-channel VMUX/VDMUX on quartz substrate |
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